Gridded DC Ion Sources
Proven linear gridded DC Ion Sources for highly uniform, reliable ion beam deposition process platforms utilizing large/wide individual substrates or large substrate batches.
Get stable power for ion source operation with °ÄÃÅÁùºÏ²Ê×ÊÁÏ’s SOLUSâ„¢ DC Ion Source Controller, featuring a state-of-the-art precision control…
Read more
A proven linear source for large/wide substrates or large substrate batches, °ÄÃÅÁùºÏ²Ê×ÊÁÏ’s gridded DC Ion Sources are ideal for…
Read more